file title | size | platform | operation |
---|---|---|---|
Xenon data sheet | 0.11M | xp | detail |
TMB data sheet | M | xp | detail |
TEOS data sheet | 0.23M | xp | detail |
SiHCl3 data sheet | 0.17M | xp | detail |
SiCl4 data sheet | 0.17M | xp | detail |
Si2H6 data sheet | 0.41M | xp | detail |
SF6 data sheet | 0.23M | xp | detail |
CHF3 R23 data sheet | 0.11M | xp | detail |
PH3 data sheet | 0.11M | xp | detail |
O2 data sheet | 0.41M | xp | detail |
NO data sheet | 0.11M | xp | detail |
NF3 data sheet | M | xp | detail |
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